---
type: "WebPage"
title: "Our surface characterisation and failure analysis equipment"
description: "SEM-EDX nvironmental scanning electron microscope (ESEM) coupled with energy-dispersive x-ray microanalysis (EDX) High vacuum and low vacuum modes for conductive and insulating samples - Secondary and backscattered electron detector (topographic and chemical contrast) - EDX semi-quantitative chemical analysis (point mode,..."
resource: "https://filab.fr/en/our-services/our-expertise-services/laboratory-analysis-failures/our-surface-characterisation-and-failure-analysis-equipment/"
tags: ["EN", "pll_612901fca07cf", "Thomas GAUTIER"]
timestamp: "2025-12-31T08:54:15Z"
published: "2021-08-27T15:17:16Z"
language: "en"
author: "bwa"
---

# Our surface characterisation and failure analysis equipment

## SEM-EDX

nvironmental scanning electron microscope (ESEM) coupled with energy-dispersive x-ray microanalysis (EDX)

 

High vacuum and low vacuum modes for conductive and insulating samples – Secondary and backscattered electron detector (topographic and chemical contrast) – EDX semi-quantitative chemical analysis (point mode, mapping, detection of elements from boron)

## Optical microscope

optical miscroscope